1. The equipment is a stainless steel monolithic frame structure with reasonable layout, novel appearance and convenient operation;
2. The silicon wafers are placed in the water tank before loading, and the water in the water tank is maintained at a certain temperature through the heating system, and the design is humanized;
3. The water system can realize automatic water change and recycle water at regular intervals, and after initial filtration, it is recycled through a bag filter, and is equipped with a quick cleaning device to keep the waterway unblocked;
4. Using PLC programmable controller, the program runs reliably and has complete functions. Various operating modes can be adjusted and set on the touch screen or control panel;
5. Equipped with AC servo system for high-precision positioning;
6. OMRON high-sensitivity sensor is used for scanning monitoring;
7. With calibration function of zero position and working position, calibration is fast, accurate and high precision;
8. Equipped with a series of safety protection devices: 8.1 Water working status monitoring and automatic water level adjustment function;
8.2 There is an alarm for the upper and lower limit position during operation;
8.3 The equipment is equipped with emergency stop and reset stop functions;
8.4 It has the function of leakage protection device and grounding terminal of the whole machine.
9. The wafer box positioning fixture can adapt to the rapid conversion of 6-inch/8-inch wafers at any time, with simple operation and reliable performance. The silicon wafer buffer block can effectively avoid the stress damage caused by the impact of the silicon wafer entering the box.
